微通道板喇叭口形貌的干法制备THE FABRICATION OF FUNNEL TYPE MICROCHANNEL PLATE WITH DRY ETCHING PROCESS
张忠山,李瑶,杨海方,赵璇,蔡华
摘要(Abstract)：
微通道板是一种二维连续电子倍增电真空器件,对大多数荷电粒子、部分高能粒子和短波光具有一定的量子探测效率,因为在微光夜视、航空航天探测、核探测及大型科学仪器领域有着广泛的应用,是我国高端科学仪器关键核心部件,也是国家重大工程、战略性新兴产业与国防建设关键基础材料,其材料及制造优化和高性能化是国际研发热点。增益是微通道板的一个重要性能指标,增益的增加会改善信噪比或者探测效率;传统的微通道板在测试电压为800V的增益为2000～4000,而本文通过离子束刻蚀扩口微通道板在同样条件的增益为6020。因此,本文研究内容将为提高我国高端仪器质量,摆脱关键零部件长期受制于人的现状提供新机遇。
关键词(KeyWords)： 微通道板;量子探测;扩口微通道板;离子束刻蚀
基金项目(Foundation): 国家重点研发计划资助（2022YFF0709300）
作者(Author): 张忠山,李瑶,杨海方,赵璇,蔡华
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