基于偏振片的微小位移测量系统A MICRO-DISPLACEMENT MEASUREMENT SYSTEM BASED ON POLARIZERS
孙明新,李重元,邓力珲,郑晓,董国波,徐平
摘要(Abstract)：
针对传统光杠杆法在微米级位移测量中精度不足与光路调整复杂的问题,本研究提出一种基于偏振片原理的非接触式高精度测量方法。该方法通过杨氏模量仪产生微小位移,结合自主设计的光杠杆底座角度转换装置将位移量转化为偏振角变化,并依据马吕斯定律选用高稳定性光源(光强50000.0lx,波动<0.4%)与高偏振度偏振片(即线偏振度DOLP>99.988%)将偏振角转换为光强信号;通过密度聚类(DBSCAN)算法去噪及光强线性修正模型优化数据,显著提升测量可靠性。实验结果表明,在0.217～1419μm范围内,该方法相对误差<1.2%,不确定度优于0.62μm,性能显著优于传统光杠杆法。该方案兼具高精度、高稳定性与低成本优势,可为教学演示及工业微位移检测提供高效可靠的解决方案。
关键词(KeyWords)： 微小位移测量;光杠杆;马吕斯定律;DBSCAN去噪;光强修正
基金项目(Foundation):
作者(Author): 孙明新,李重元,邓力珲,郑晓,董国波,徐平
DOI: 10.27024/j.wlygc.2026.03.25.01
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