全军,孙萌涛

• 1:岭南师范学院物理系
• 2:北京科技大学数理学院

摘要(Abstract)：

文章基于三管嵌套式轴对称主流ICP炬管结构模型,模拟研究了负载线圈功率和采样锥孔径对ICP气体温度分布和流场特性的影响。研究结果表明:(1)增加负载功率能够提高ICP高温核心区的气体温度,但超过一定阈值后负载功率对中心通道上的气体温度无明显影响;(2)采样锥孔径扩大将导致负载功率难以输送到中心通道上,负载功率较高,中心通道的高温区段部分(气体温度大于6000K)会变窄;负载功率较低,则锥前气体温度会出现明显下降,而且采样锥孔径扩大后有利于分析易于扩散的元素离子;(3)极低的负载功率或过大的采样锥孔径在中心气流和辅助气流的流动交界面造成微小扰动,但通过适当提高负载功率可以有效消除这些扰动。研究结果可为优化ICP工作参数以及设计新的离子源接口装置提供一定的理论指导。

关键词(KeyWords)： ICP离子源;负载线圈功率;采样锥孔径;流场分布

Abstract:

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基金项目(Foundation): 国家自然科学基金(11304276,91436102和11374353)资助;; 广东省自然科学基金(2017A030313022);; 大学物理教学团队(114961700249)

作者(Author): 全军,孙萌涛

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