张锁歆,钱建强,郝维昌,秦雨浩,姚星群

• 1:北京航空航天大学物理科学与核能工程学院

摘要(Abstract)：

椭偏仪是一种常用的现代光学测量仪器,在物理实验教学中常用于测量各向同性材料的折射率、表面薄膜厚度等光学参数。本文提出一种利用教学型椭偏仪测量各向异性单轴晶体折射率等光学参数的方法。采用多入射角的方法增加系统自由度,建立数值反演模型,获得各向异性单轴晶体光学参数,并实验测量了钒酸钇晶体的折射率等光学参数。使用教学型椭偏仪测量各向异性单轴晶体光学参数,拓展了原有教学仪器的实验范围,有助于激发学生对实验的兴趣。

关键词(KeyWords)： 椭偏仪;各向异性晶体;光学参数;折射率

Abstract:

Keywords:

基金项目(Foundation):

作者(Author): 张锁歆,钱建强,郝维昌,秦雨浩,姚星群

参考文献(References)：

• [1]YONG B S,YUN Y H,JOO K N.3D multi-layered film thickness profile measurements based on photometric type imaging ellipsometry[J].International Journal of Precision Engineering&Manufacturing,2016,17(8):989-993.
• [2]WEBER J W,CALADO V E,Van d S M C M.Optical constants of graphene measured by spectroscopic ellipsometry[J].Applied Physics Letters,2010,97(9):10451.
• [3]JUNG I,VAUPEL M,PELTON M,et al.Characterization of thermally reduced graphene oxide by imaging ellipsometry[J].Journal of Physical Chemistry C,2008,112(23):8499-8506.
• [4]GRIESHABER D,MACKENZIE R,VRS J,et al.Electrochemical biosensors-sensor principles and architectures[J].Sensors,2008,8(3):1400.
• [5]LO Y L,CHUNG Y F,LIN H H.Polarization scanning ellipsometry method for measuring effective ellipsometric parameters of isotropic and anisotropic thin films[J].Journal of Lightwave Technology,2013,31(14):2361-2369.
• [6]SCHUBERT M.Generalized ellipsometry and complex optical systems[J].Thin Solid Films,1998,s313-314(97):323-332.
• [7]GONZALEZ-FUENTES C,GONZALEZ-DIAZ J B,Fallarino L,et al.Influence of the light incidence angle on the precision of generalized magneto-optical ellipsometry[J].Journal of Magnetism&Magnetic Materials,2015,386:150-154.
• [8]LARSEN G K,ZHAO Y.Extracting the anisotropic optical parameters of chiral plasmonic nanostructured thin films using generalized ellipsometry[J].Applied Physics Letters,2014,105(7):2517-2534.
• [9]吴先球,熊予莹.近代物理实验教程[M].北京:科学出版社,2009.
• [10]姚志,丁洪斌,杨华.椭偏法测量薄膜参数的实验改进[J].物理与工程,2013,23(5):42-44.YAO Z,DING H B,YANG H.Experimental improvement of measuring thin film parameters by ellipsometry method[J].Physics and Engineering,2013,23(5):42-44.(in Chinese)
• [11]熊俊.近代物理实验[M].北京:北京师范大学出版社,2007.
• [12]黄志高.近代物理实验[M].北京:科学出版社,2012.
• [13]李景镇.光学手册(上下卷)(精)[M].西安:陕西科技出版社,2010.
• [14]孟宪林,张怀金,祝俐,等.掺钕钒酸钇单晶光谱与激光特性[J].人工晶体学报,1999,28(2):135-139.MENG X L,ZHANG H J,ZHU L,et al.Spectra and laser properties of Nd∶YVO4single crystal[J].Journal of Synthetic Crystals,1999,28(2):135-139.(in Chinese)