宿非凡,杨钊华

• 1:中国电子信息产业集团长城实验室
• 2:天津先进技术研究院
• 3:合肥国家实验室
• 4:中国科学院物理研究所

摘要(Abstract)：

近年来随着各个科技强国和科技巨头企业的高度重视，超导量子计算技术发展迅速，在不到10年的时间内单个超导量子比特的退相干时间增长了5个数量级，从纳秒提高到了百微秒的量级，并有望提高到毫秒量级甚至秒的量级。超导量子比特芯片的制备是实现超导量子计算的基础，作为“物理前沿介绍——超导量子计算”系列的第六篇，本文系统阐述制备超导量子比特及其辅助器件芯片的微纳加工方法，并对制备方法的发展趋势作展望。通过本文，旨在帮助广大高校物理专业教师、高年级本科生、研究生以及对超导量子计算感兴趣的理工科背景读者系统了解实现超导量子比特芯片的微加工方法与工艺，全面地、实物化地理解超导量子计算技术。

关键词(KeyWords)： 超导量子比特;约瑟夫森结;空气桥

Abstract:

Keywords:

基金项目(Foundation):

作者(Author): 宿非凡,杨钊华

参考文献(References)：

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