二维热传导方程在高能脉冲离子束溅射中的应用THE APPLICATION OF TWO DIMENSION HEAT CONDUCTION EQUATION IN INTENSE PULSED ION BEAM SPUTTERING
李莉,雷雨,滕保华,吴明和,杨宏春
摘要(Abstract):
本文基于能量守恒定律和傅里叶定律,建立了一种非常简单而直观的二维热传导物理模型。以工程上熔石英光学元件的氩离子束溅射为切入点,采用时域有限差分法数值计算了熔石英内部温度的二维演化规律,以及不同位置温度随时间的演化规律。计算结果表明,沿离子束入射方向熔石英温度演化规律呈现类高斯分布;离子束辐照区域内任一点的温度随时间的演化规律很大程度上依赖于入射离子束的脉冲形状。文中利用热学知识详细讨论了光学元件表面能量吸收对元件温度演化规律的影响。
关键词(KeyWords): 热传导;离子束溅射;时域有限差分法;温度
基金项目(Foundation):
作者(Author): 李莉,雷雨,滕保华,吴明和,杨宏春
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